Development of sputtering systems for large-area deposition of CuIn1-xGaxSe1-ySy thin-film solar cells
Identifieur interne : 00C233 ( Main/Repository ); précédent : 00C232; suivant : 00C234Development of sputtering systems for large-area deposition of CuIn1-xGaxSe1-ySy thin-film solar cells
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Abstract
CuIn1-xGaxSe1-ySy (CIGS) thin-film modules are expected to become cheaper than crystalline silicon modules within 5 yr. At present, commissioning and reaching full production of thin film modules is delayed because of nonavailability of turnkey manufacturing plants. Very few universities are conducting research on development of PV plants. CIGS thin-film solar cells are being prepared routinely at Florida Solar Energy Center (FSEC) on glass and metallic foil substrates for terrestrial and space applications. Earlier, the substrate size was limited to 3×3 cm2. This article presents results of development of large-area sputtering systems for preparation of large (15.2×15.2 cm2) CIGS thin-film solar cells. The facilities have the potential of serving as a nucleus of a pilot plant for fabrication of CIGS minimodules. Initial problems of bowing of the brass diaphragm, restriction of effective water flow and consequent heating of the target material were resolved by increasing the thickness of the backing plate and redesigning the structural members. Thickness uniformity was improved by modifying the magnetic field distribution in the middle 15 cm portion of the 10.2×30.5 cm2 magnetron sputtering sources by selectively removing nickel-coated soft-iron pieces at the rear. This resulted in Mo layer thickness uniformity of ±3% over 10.2×10.2 cm2. The magnetic field was boosted at extremities to avoid precipitous ∼15% drop beyond 10.2 cm. With this, thickness uniformities of ±2.5% for Mo and ±4.5% for ZnO over 12.7×10.2 cm2 have been achieved however with a continuing drop beyond 12.7 cm width. Modifying the magnetic field to achieve better distribution by preferentially removing soft irons pieces and also boosting of the magnetic field at the ends are two new concepts introduced and successfully utilized in this study. Scaling up of the large-area uniform deposition of metallic precursor layers was a challenging task. The efforts were directed towards obtaining similar thickness and uniformity that have provided very good photovoltaic efficiencies of 10.4% (Air mass AM 1.5) in small area CIGS thin film solar cells on stainless steel foils in earlier research. Preliminary results on large area CIGS solar cells are encouraging. © 2003 American Vacuum Society.
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<record><TEI><teiHeader><fileDesc><titleStmt><title xml:lang="en" level="a">Development of sputtering systems for large-area deposition of CuIn<sub>1-x</sub>Ga<sub>x</sub>Se<sub>1-y</sub>S<sub>y</sub> thin-film solar cells</title><author><name sortKey="Dhere, Neelkanth G" uniqKey="Dhere N">Neelkanth G. Dhere</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa, Florida 32922-5703</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Floride</region></placeName><wicri:cityArea>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa</wicri:cityArea></affiliation></author><author><name sortKey="Gade, Vivek S" uniqKey="Gade V">Vivek S. Gade</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa, Florida 32922-5703</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Floride</region></placeName><wicri:cityArea>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa</wicri:cityArea></affiliation></author><author><name sortKey="Jahagirdar, Anant H" uniqKey="Jahagirdar A">Anant H. Jahagirdar</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa, Florida 32922-5703</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Floride</region></placeName><wicri:cityArea>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa</wicri:cityArea></affiliation></author><author><name sortKey="Kadam, Ankur A" uniqKey="Kadam A">Ankur A. Kadam</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa, Florida 32922-5703</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Floride</region></placeName><wicri:cityArea>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa</wicri:cityArea></affiliation></author><author><name sortKey="Patil, Harshad P" uniqKey="Patil H">Harshad P. Patil</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa, Florida 32922-5703</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Floride</region></placeName><wicri:cityArea>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa</wicri:cityArea></affiliation></author><author><name sortKey="Kulkarni, Sachin S" uniqKey="Kulkarni S">Sachin S. Kulkarni</name><affiliation wicri:level="2"><inist:fA14 i1="01"><s1>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa, Florida 32922-5703</s1><sZ>1 aut.</sZ><sZ>2 aut.</sZ><sZ>3 aut.</sZ><sZ>4 aut.</sZ><sZ>5 aut.</sZ><sZ>6 aut.</sZ></inist:fA14><country xml:lang="fr">États-Unis</country><placeName><region type="state">Floride</region></placeName><wicri:cityArea>Florida Solar Energy Center, 1679 Clearlake Road, Cocoa</wicri:cityArea></affiliation></author></titleStmt><publicationStmt><idno type="inist">03-0316209</idno><date when="2003-07">2003-07</date><idno type="stanalyst">PASCAL 03-0316209 AIP</idno><idno type="RBID">Pascal:03-0316209</idno><idno type="wicri:Area/Main/Corpus">00D003</idno><idno type="wicri:Area/Main/Repository">00C233</idno></publicationStmt><seriesStmt><idno type="ISSN">0734-2101</idno><title level="j" type="abbreviated">J. vac. sci. technol., A, Vac. surf. films</title><title level="j" type="main">Journal of vacuum science and technology. A. Vacuum, surfaces, and films</title></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Copper compounds</term><term>Experimental study</term><term>Gallium compounds</term><term>Indium compounds</term><term>Semiconductor growth</term><term>Semiconductor thin films</term><term>Solar cells</term><term>Sputter deposition</term><term>Ternary semiconductors</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>8460J</term><term>8115C</term><term>8105H</term><term>Etude expérimentale</term><term>Cuivre composé</term><term>Indium composé</term><term>Gallium composé</term><term>Cellule solaire</term><term>Semiconducteur ternaire</term><term>Dépôt pulvérisation</term><term>Croissance semiconducteur</term><term>Couche mince semiconductrice</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">CuIn<sub>1-x</sub>Ga<sub>x</sub>Se<sub>1-y</sub>S<sub>y</sub> (CIGS) thin-film modules are expected to become cheaper than crystalline silicon modules within 5 yr. At present, commissioning and reaching full production of thin film modules is delayed because of nonavailability of turnkey manufacturing plants. Very few universities are conducting research on development of PV plants. CIGS thin-film solar cells are being prepared routinely at Florida Solar Energy Center (FSEC) on glass and metallic foil substrates for terrestrial and space applications. Earlier, the substrate size was limited to 3×3 cm<sup>2</sup>. This article presents results of development of large-area sputtering systems for preparation of large (15.2×15.2 cm<sup>2</sup>) CIGS thin-film solar cells. The facilities have the potential of serving as a nucleus of a pilot plant for fabrication of CIGS minimodules. Initial problems of bowing of the brass diaphragm, restriction of effective water flow and consequent heating of the target material were resolved by increasing the thickness of the backing plate and redesigning the structural members. Thickness uniformity was improved by modifying the magnetic field distribution in the middle 15 cm portion of the 10.2×30.5 cm<sup>2</sup> magnetron sputtering sources by selectively removing nickel-coated soft-iron pieces at the rear. This resulted in Mo layer thickness uniformity of ±3% over 10.2×10.2 cm<sup>2</sup>. The magnetic field was boosted at extremities to avoid precipitous ∼15% drop beyond 10.2 cm. With this, thickness uniformities of ±2.5% for Mo and ±4.5% for ZnO over 12.7×10.2 cm<sup>2</sup> have been achieved however with a continuing drop beyond 12.7 cm width. Modifying the magnetic field to achieve better distribution by preferentially removing soft irons pieces and also boosting of the magnetic field at the ends are two new concepts introduced and successfully utilized in this study. Scaling up of the large-area uniform deposition of metallic precursor layers was a challenging task. The efforts were directed towards obtaining similar thickness and uniformity that have provided very good photovoltaic efficiencies of 10.4% (Air mass AM 1.5) in small area CIGS thin film solar cells on stainless steel foils in earlier research. 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All rights reserved.</s1></fA44><fA47 i1="01" i2="1"><s0>03-0316209</s0></fA47><fA60><s1>P</s1><s2>C</s2></fA60><fA61><s0>A</s0></fA61><fA64 i1="01" i2="1"><s0>Journal of vacuum science and technology. A. Vacuum, surfaces, and films</s0></fA64><fA66 i1="01"><s0>USA</s0></fA66><fC01 i1="01" l="ENG"><s0>CuIn<sub>1-x</sub>Ga<sub>x</sub>Se<sub>1-y</sub>S<sub>y</sub> (CIGS) thin-film modules are expected to become cheaper than crystalline silicon modules within 5 yr. At present, commissioning and reaching full production of thin film modules is delayed because of nonavailability of turnkey manufacturing plants. Very few universities are conducting research on development of PV plants. CIGS thin-film solar cells are being prepared routinely at Florida Solar Energy Center (FSEC) on glass and metallic foil substrates for terrestrial and space applications. Earlier, the substrate size was limited to 3×3 cm<sup>2</sup>. This article presents results of development of large-area sputtering systems for preparation of large (15.2×15.2 cm<sup>2</sup>) CIGS thin-film solar cells. The facilities have the potential of serving as a nucleus of a pilot plant for fabrication of CIGS minimodules. Initial problems of bowing of the brass diaphragm, restriction of effective water flow and consequent heating of the target material were resolved by increasing the thickness of the backing plate and redesigning the structural members. Thickness uniformity was improved by modifying the magnetic field distribution in the middle 15 cm portion of the 10.2×30.5 cm<sup>2</sup> magnetron sputtering sources by selectively removing nickel-coated soft-iron pieces at the rear. This resulted in Mo layer thickness uniformity of ±3% over 10.2×10.2 cm<sup>2</sup>. The magnetic field was boosted at extremities to avoid precipitous ∼15% drop beyond 10.2 cm. With this, thickness uniformities of ±2.5% for Mo and ±4.5% for ZnO over 12.7×10.2 cm<sup>2</sup> have been achieved however with a continuing drop beyond 12.7 cm width. Modifying the magnetic field to achieve better distribution by preferentially removing soft irons pieces and also boosting of the magnetic field at the ends are two new concepts introduced and successfully utilized in this study. Scaling up of the large-area uniform deposition of metallic precursor layers was a challenging task. The efforts were directed towards obtaining similar thickness and uniformity that have provided very good photovoltaic efficiencies of 10.4% (Air mass AM 1.5) in small area CIGS thin film solar cells on stainless steel foils in earlier research. 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